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| NANO 2194 Advanced Semiconductor Processing - 3 credits In-depth understanding of the oxidation process. Etching, including wet and dry etching and photoresist stripping. Doping, including diffusion techniques and ion implantation. Thin film deposition, including DVD and LPCVD and metalization as methods of deposition. Wafer testing, evaluation, and yield factors. The future of the semiconductor industry will also be explored. SPRING Prerequisites: MECT 1294 |