 |
|
 |
 |
| NANO 2298 Photolithography - 4 credits The process of Photolithography as it is used in the semiconductor industry for transferring a pattern from the mask to the wafer. Photomasking overview, optics and wavelength, photoresist chemistry, masking and reticules, steppers and their individual components and adjustments, measuring equipment related to dimensional inspection, resistivity, flatness, and thickness, coating, baking, developing, and the use of equipment that affect the production of a successful product. FALL Prerequisites: MECT 1294 |