Technical Papers
A Short History of Vacuum
Terminology and Technology
http://www.mcallister.com/vacuum.html
Fabless Semiconductor Association White Papers
http://www.fsa.org/resources/whitepapers/
MKS Technical Papers
http://www.mksinst.com/techpap.html
Cypress Semiconductor Technical Articles
http://www.cypress.com/design/results.cfm?tab=Technical%20Articles
PolarFab Articles and White Papers
http://www.polarfab.com/articles.asp
Journals of vacuum science and technology
http://www.sansalone.de/engl/lk_vacuum_journals.htm
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